Field measurement analyses and improvement simulation of airflow parallelism in a wafer-griding cleanroom
Cleanrooms are essential in the semiconductor industry, where the environment must be strictly regulated to prevent contamination that could affect product quality. However, many factors are crucial, and the process can be complex, such as temperature, relative humidity, airflow distribution, partic...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
EDP Sciences
2025-01-01
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| coleção: | E3S Web of Conferences |
| Acesso em linha: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2025/72/e3sconf_roomvent2025_02015.pdf |
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