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Piezoelectric Normally Open Microvalve with Multiple Valve Seat Trenches for Medical Applications

Microfluidic systems for medical applications necessitate reliable, wide flow range, and low leakage microvalves for flow path control. High design complexity of microvalves increases the risk of possible malfunction. We present a normally open microvalve based on energy-efficient piezoelectric actu...

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Bibliographic Details
Main Authors: Claudia Patricia Durasiewicz, Sophia Thekla Güntner, Philipp Klaus Maier, Wolfgang Hölzl, Gabriele Schrag
Format: Artigo
Language:Inglês
Published: MDPI AG 2021-10-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/11/19/9252
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