Piezoelectric Normally Open Microvalve with Multiple Valve Seat Trenches for Medical Applications
Microfluidic systems for medical applications necessitate reliable, wide flow range, and low leakage microvalves for flow path control. High design complexity of microvalves increases the risk of possible malfunction. We present a normally open microvalve based on energy-efficient piezoelectric actu...
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| Principais autores: | , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI AG
2021-10-01
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| Serija: | Applied Sciences |
| Teme: | |
| Online dostop: | https://www.mdpi.com/2076-3417/11/19/9252 |
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