Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Relia...

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Hlavní autoři:	Guangzhou Geng, Zhongshan Zhang, Chensheng Li, Ruhao Pan, Yunlong Li, Haifang Yang, Junjie Li
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2022-05-01
Edice:	Micromachines
Témata:	atomic layer deposition sacrificial templates 3D nanostructures
On-line přístup:	https://www.mdpi.com/2072-666X/13/6/856
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