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Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Relia...

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Autors principals: Guangzhou Geng, Zhongshan Zhang, Chensheng Li, Ruhao Pan, Yunlong Li, Haifang Yang, Junjie Li
Format: Artigo
Idioma:Inglês
Publicat: MDPI AG 2022-05-01
Col·lecció:Micromachines
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Accés en línia:https://www.mdpi.com/2072-666X/13/6/856
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