Speckle-based curvature optical metrology
Abstract Advanced metrology methods are continually being developed and refined to meet the demanding quality standards of high-performance X-ray mirrors. Among these, interferometric techniques are the most widely used for measuring the height maps of optical surfaces. However, they often encounter...
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| Principais autores: | , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group
2026-04-01
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| Serier: | Light: Science & Applications |
| Online adgang: | https://doi.org/10.1038/s41377-026-02257-x |
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