A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies,...
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| Hlavní autoři: | , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
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MDPI AG
2021-01-01
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| Edice: | Micromachines |
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| On-line přístup: | https://www.mdpi.com/2072-666X/12/1/82 |
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