Self-calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry

Deflectometric profilometers are used to precisely measure the form of beam shaping optics of synchrotrons and X-ray free-electron lasers. They often utilize autocollimators which measure slope by evaluating the displacement of a reticle image on a detector. Based on our privileged access to the raw...

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Үндсэн зохиолчид:	Ralf D. Geckeler, Andreas Just, Michael Krause, Olaf Schnabel, Ian Lacey, Damon English, Valeriy V. Yashchuk
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	International Union of Crystallography 2024-07-01
Цуврал:	Journal of Synchrotron Radiation
Нөхцлүүд:	angle metrology autocollimator optical metrology form measurement deflectometry profilometry data processing error suppression synchrotron free-electron laser
Онлайн хандалт:	https://journals.iucr.org/paper?S1600577524003552
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!