Self-calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry
Deflectometric profilometers are used to precisely measure the form of beam shaping optics of synchrotrons and X-ray free-electron lasers. They often utilize autocollimators which measure slope by evaluating the displacement of a reticle image on a detector. Based on our privileged access to the raw...
Gardado en:
| Principais autores: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
International Union of Crystallography
2024-07-01
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| Series: | Journal of Synchrotron Radiation |
| Assuntos: | |
| Acceso en liña: | https://journals.iucr.org/paper?S1600577524003552 |
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