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Multiphoton Absorption Simulation of Sapphire Substrate under the Action of Femtosecond Laser for Larger Density of Pattern-Related Process Windows

It is essential to develop pattern-related process windows on substrate surface for reducing the dislocation density of wide bandgap semiconductor film growth. For extremely high instantaneous intensity and excellent photon absorption rate, femtosecond lasers are currently being increasingly adopted...

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Detaylı Bibliyografya
Asıl Yazarlar: Xintian Cai, Chaoyue Ji, Changkai Li, Zhiqiang Tian, Xuan Wang, Cheng Lei, Sheng Liu
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI AG 2021-12-01
Seri Bilgileri:Micromachines
Konular:
Online Erişim:https://www.mdpi.com/2072-666X/12/12/1571
Etiketler: Etiketle
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