Growing and polishing methods aiming at CVD diamond wafer over 10-inch
Flat-surfaced and large-size diamond wafers are essential for industrial applications, analogous to silicon (Si) wafers over 10-inch. A promising approach for the industrial-scale production of large-size diamond wafers involves chemical vapor deposition (CVD) techniques that generate large-area pla...
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| Hoofdauteurs: | , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Taylor & Francis Group
2025-12-01
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| Reeks: | Functional Diamond |
| Onderwerpen: | |
| Online toegang: | http://dx.doi.org/10.1080/26941112.2025.2523762 |
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