Fabrication of an Au–Au/carbon nanotube-composite contacts RF-MEMS switch
Abstract This study aims to propose a new fabrication method for an ohmic contact type RF-MEMS switch with Au–Au/carbon nanotube (CNT)-composite contacts. These contacts are proposed to improve the reliability and the high-power handling capability of the ohmic contact type RF-MEMS switch. During th...
Sábháilte in:
| Príomhchruthaitheoirí: | , , , , , |
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| Formáid: | Artigo |
| Teanga: | Inglês |
| Foilsithe / Cruthaithe: |
SpringerOpen
2018-11-01
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| Sraith: | Micro and Nano Systems Letters |
| Ábhair: | |
| Rochtain ar líne: | http://link.springer.com/article/10.1186/s40486-018-0068-z |
| Clibeanna: |
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