Temperature Effects in Packaged RF MEMS Switches with Optimized Gold Electroplating Process
Due to its excellent electrical performance, mechanical reliability, and thermal stability, electroplated gold is still the most commonly used material for movable beams in RF MEMS switches. This paper investigates the influence of process conditions on the quality and growth rate of gold electropla...
Tallennettuna:
| Päätekijät: | , , , |
|---|---|
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
MDPI AG
2024-08-01
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| Sarja: | Micromachines |
| Aiheet: | |
| Linkit: | https://www.mdpi.com/2072-666X/15/9/1085 |
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