Concepts and Key Technologies of Microelectromechanical Systems Resonators
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stabi...
-д хадгалсан:
| Үндсэн зохиолчид: | , , , , |
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| Формат: | Artigo |
| Хэл сонгох: | Inglês |
| Хэвлэсэн: |
MDPI AG
2022-12-01
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| Цуврал: | Micromachines |
| Нөхцлүүд: | |
| Онлайн хандалт: | https://www.mdpi.com/2072-666X/13/12/2195 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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