Stencil Lithography for Scalable Micro- and Nanomanufacturing
In this paper, we review the current development of stencil lithography for scalable micro- and nanomanufacturing as a resistless and reusable patterning technique. We first introduce the motivation and advantages of stencil lithography for large-area micro- and nanopatterning. Then we review the pr...
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| Autors principals: | , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2017-04-01
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| Col·lecció: | Micromachines |
| Matèries: | |
| Accés en línia: | http://www.mdpi.com/2072-666X/8/4/131 |
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