Nano indentation studies on ceramic thinfilms coatings deposited using sputtering process for energy applications
Nanoindentation technique is generally used for measuring thinfilm mechanical properties such as hardness, modulus and stiffness. Nanoindentation of ceramic thinfilms of SiO2, Si3N4 and Al2O3 was deposited by radio-frequency (RF) magnetron sputtering on the stainless steel (SS304) substrates using a...
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| Hoofdauteurs: | , , , , , , , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
KeAi Communications Co., Ltd.
2024-01-01
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| Reeks: | Materials Science for Energy Technologies |
| Onderwerpen: | |
| Online toegang: | http://www.sciencedirect.com/science/article/pii/S2589299123000447 |
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