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The Effect of an Ag Nanofilm on Low-Temperature Cu/Ag-Ag/Cu Chip Bonding in Air

Low-temperature Cu-Cu bonding technology plays a key role in high-density and high-performance 3D interconnects. Despite the advantages of good electrical and thermal conductivity and the potential for fine pitch patterns, Cu bonding is vulnerable to oxidation and the high temperature of the bonding...

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Principais autores: Yoonho Kim, Seungmin Park, Sarah Eunkyung Kim
Format: Artigo
Jezik:Inglês
Izdano: MDPI AG 2021-10-01
Serija:Applied Sciences
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Online dostop:https://www.mdpi.com/2076-3417/11/20/9444
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