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Feasibility study of the microforming combined with selective chemical vapor deposition

Microforming has been received much attention in the recent decades due to the wide use of microparts in electronics and medical applications. For the further functionalization of these micro devices, high functional surfaces with noble metals and nanomaterials are strongly required in bio- and medi...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Egile Nagusiak: Koshimizu Kazushi, Shimizu Tetsuhide, Yang Ming
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: EDP Sciences 2015-01-01
Saila:Manufacturing Review
Gaiak:
Sarrera elektronikoa:http://dx.doi.org/10.1051/mfreview/2015026
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