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Feasibility study of the microforming combined with selective chemical vapor deposition

Microforming has been received much attention in the recent decades due to the wide use of microparts in electronics and medical applications. For the further functionalization of these micro devices, high functional surfaces with noble metals and nanomaterials are strongly required in bio- and medi...

詳細記述

保存先:
書誌詳細
主要な著者: Koshimizu Kazushi, Shimizu Tetsuhide, Yang Ming
フォーマット: Artigo
言語:Inglês
出版事項: EDP Sciences 2015-01-01
シリーズ:Manufacturing Review
主題:
オンライン・アクセス:http://dx.doi.org/10.1051/mfreview/2015026
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