A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors
Recently, due to the development of semiconductor technology, high-performance memory and digital convergence technology that integrates and implements various functions into one semiconductor chip has been regarded as the next-generation core technology. In the semiconductor manufacturing process,...
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| Huvudupphov: | , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Utgiven: |
MDPI AG
2023-01-01
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| Serie: | Sensors |
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| Länkar: | https://www.mdpi.com/1424-8220/23/2/905 |
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