A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors
Recently, due to the development of semiconductor technology, high-performance memory and digital convergence technology that integrates and implements various functions into one semiconductor chip has been regarded as the next-generation core technology. In the semiconductor manufacturing process,...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI AG
2023-01-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/2/905 |
| Tags: |
No Tags, Be the first to tag this record!
|