Short-Pulse Laser-Assisted Fabrication of a Si-SiO₂ Microcooling Device

Thermal management is one of the main challenges in the most demanding detector technologies and for the future of microelectronics. Microfluidic cooling has been proposed as a fully integrated solution to the heat dissipation problem in modern high-power microelectronics. Traditional manufacturing...

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Autors principals:	Alexandros Mouskeftaras, Stephan Beurthey, Julien Cogan, Gregory Hallewell, Olivier Leroy, David Grojo, Mathieu Perrin-Terrin
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2021-08-01
Col·lecció:	Micromachines
Matèries:	laser materials processing microcooling microfluidic device
Accés en línia:	https://www.mdpi.com/2072-666X/12/9/1054
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