Design and Fabrication of Micro/Nano Sensors and Actuators
A micro-electromechanical system (MEMS) is a micro device or system that utilizes large-scale integrated circuit manufacturing technology and microfabrication technology to integrate microsensors, micro-actuators, microstructures, signal processing and control circuits, power supplies, and communica...
में बचाया:
| मुख्य लेखकों: | , , |
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| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
MDPI AG
2024-05-01
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| श्रृंखला: | Micromachines |
| विषय: | |
| ऑनलाइन पहुंच: | https://www.mdpi.com/2072-666X/15/6/674 |
| टैग: |
कोई टैग नहीं, इस रिकॉर्ड को टैग करने वाले पहले व्यक्ति बनें!
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