Design and Fabrication of Micro/Nano Sensors and Actuators
A micro-electromechanical system (MEMS) is a micro device or system that utilizes large-scale integrated circuit manufacturing technology and microfabrication technology to integrate microsensors, micro-actuators, microstructures, signal processing and control circuits, power supplies, and communica...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2024-05-01
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| Col·lecció: | Micromachines |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2072-666X/15/6/674 |
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