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A Thermal Actuated Bistable Structure for Generating On-Chip Shock Loads

In this paper, we propose a bistable shock structure based on the thermal actuation principle, which overcomes the response time limitation of heating and cooling in typical thermal actuators and enables a rapid release of energy. Thus, force with a steep rising edge can be applied on a target. Usin...

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Detalles Bibliográficos
Principais autores: Runze Yu, Dacheng Zhang
Formato: Artigo
Idioma:Inglês
Publicado: MDPI AG 2022-04-01
Series:Micromachines
Assuntos:
Acceso en liña:https://www.mdpi.com/2072-666X/13/4/569
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