Effect of surface patterning using femtosecond laser on micromechanical and structural properties of micromechanical sensors
A femtosecond laser can be used to fabricate microstructures on a silicon microcantilever surface with high precession and minimal sidewall defects. The aim of this study is to investigate the effect of the creation of microgrooves and sub-microgrooves on the resonance frequency, quality factor, and...
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| Principais autores: | , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
IOP Publishing
2020-01-01
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| Serier: | Materials Research Express |
| Fag: | |
| Online adgang: | https://doi.org/10.1088/2053-1591/ababbd |
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