Effect of surface patterning using femtosecond laser on micromechanical and structural properties of micromechanical sensors

A femtosecond laser can be used to fabricate microstructures on a silicon microcantilever surface with high precession and minimal sidewall defects. The aim of this study is to investigate the effect of the creation of microgrooves and sub-microgrooves on the resonance frequency, quality factor, and...

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Bibliografische gegevens

Hoofdauteurs:	Mahmoud A Al-Gawati, Abdulaziz Alhazaa, Hamad Albrithen, Jamal Alnofiay, Abdullah Alodhayb
Formaat:	Artigo
Taal:	Inglês
Gepubliceerd in:	IOP Publishing 2020-01-01
Reeks:	Materials Research Express
Onderwerpen:	femtosecond laser microcantilever resonance frequency spring constant quality factor
Online toegang:	https://doi.org/10.1088/2053-1591/ababbd
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