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The Annealing Effects of ZnO Thin Films on Characteristic Parameters of Au/ZnO Schottky Contacts on n-Si

200 nm ZnO thin films have been grown on n type Silicon substrates by DC sputtering technique. One of the thin films has been annealed at 300 ºC for 45 minutes. The Au front contacts on ZnO thin films have been formed by evaporation of Au metal by means of shadow mask. It has been seen that the rect...

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Principais autores: A. Toprak, T. Kilicoglu, Y.S. Ocak, K. Akkilic
Formato: Artigo
Idioma:Inglês
Publicado: Sumy State University 2012-03-01
Series:Журнал нано- та електронної фізики
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Acceso en liña:http://jnep.sumdu.edu.ua/download/numbers/2012/1/articles/jnep_2012_V4_01012.pdf
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