Influence of the Low-Energy Inert-Gas Ion Bombardment on the Structure and Properties of Metallic Thin Films
The goal of the review is to analyse the main published results of the most systematic studies of changes in the structural–phase state, the physical and chemical properties of the metallic single- and multilayer thin films’ systems after bombardment by the low-energy (< 10 eV) inert-gas ions. Nanos...
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| Hlavní autor: | |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
G. V. Kurdyumov Institute for Metal Physics of the N.A.S. of Ukraine
2024-06-01
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| Edice: | Успехи физики металлов |
| Témata: | |
| On-line přístup: | https://ufm.imp.kiev.ua/en/abstract/v25/i02/213.html |
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