Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates
We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and tran...
में बचाया:
| मुख्य लेखकों: | , , , , , , |
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| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
MDPI AG
2021-02-01
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| श्रृंखला: | Sensors |
| विषय: | |
| ऑनलाइन पहुंच: | https://www.mdpi.com/1424-8220/21/3/1014 |
| टैग: |
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