The Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscope

This paper describes the methodology of combining experimental measurements with mathematical–physics analyses in the investigation of flow in the aperture and nozzle. The aperture and nozzle separate the differentially pumped chamber from the specimen chamber in an environmental scanning electron m...

ver descrição completa

Detalhes bibliográficos

Principais autores:	Jiří Maxa, Pavla Šabacká, Jan Mazal, Vilém Neděla, Tomáš Binar, Petr Bača, Jaroslav Talár, Robert Bayer, Pavel Čudek
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2024-03-01
Colecção:	Sensors
Assuntos:	Ansys Fluent ESEM critical flow nozzle CFD numerical simulation
Acesso em linha:	https://www.mdpi.com/1424-8220/24/7/2166
Tags:	Adicionar Tag Sem tags, seja o primeiro a adicionar uma tag!