The Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscope
This paper describes the methodology of combining experimental measurements with mathematical–physics analyses in the investigation of flow in the aperture and nozzle. The aperture and nozzle separate the differentially pumped chamber from the specimen chamber in an environmental scanning electron m...
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| Autors principals: | , , , , , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2024-03-01
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| Col·lecció: | Sensors |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/1424-8220/24/7/2166 |
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