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Enhanced Infrared Absorbance of the CMOS Compatible Thermopile by the Subwavelength Rectangular-Hole Arrays

The enhanced infrared absorbance (IRA) of the complementary metal-oxide-semiconductor (CMOS) compatible thermopile with the subwavelength rectangular-hole arrays in active area is investigated. The finite-difference time-domain (FDTD) method considered and analyzed the matrix arrangement (MA) and st...

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Autori principali: Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI AG 2020-06-01
Serie:Sensors
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Accesso online:https://www.mdpi.com/1424-8220/20/11/3218
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