Enhanced Infrared Absorbance of the CMOS Compatible Thermopile by the Subwavelength Rectangular-Hole Arrays

The enhanced infrared absorbance (IRA) of the complementary metal-oxide-semiconductor (CMOS) compatible thermopile with the subwavelength rectangular-hole arrays in active area is investigated. The finite-difference time-domain (FDTD) method considered and analyzed the matrix arrangement (MA) and st...

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Principais autores:	Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2020-06-01
coleção:	Sensors
Assuntos:	subwavelength subwavelength hole arrays subwavelength rectangular-hole arrays thermopile CMOS-MEMS infrared radiation
Acesso em linha:	https://www.mdpi.com/1424-8220/20/11/3218
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