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Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)

A combination of experimental measurement preparations using pressure and temperature sensors in conjunction with the theory of one-dimensional isentropic flow and mathematical physics analyses is presented as a tool for analysis in this paper. Furthermore, the subsequent development of a nozzle for...

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Bibliografische gegevens
Hoofdauteurs: Jiří Maxa, Vilém Neděla, Pavla Šabacká, Tomáš Binar
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI AG 2024-05-01
Reeks:Sensors
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Online toegang:https://www.mdpi.com/1424-8220/24/10/3243
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