A Novel Temperature Drift Error Precise Estimation Model for MEMS Accelerometers Using Microstructure Thermal Analysis

Owing to the fact that the conventional Temperature Drift Error (TDE) precise estimation model for a MEMS accelerometer has incomplete Temperature-Correlated Quantities (TCQ) and inaccurate parameter identification to reduce its accuracy and real time, a novel TDE precise estimation model using micr...

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Principais autores:	Bing Qi, Shuaishuai Shi, Lin Zhao, Jianhua Cheng
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2022-05-01
coleção:	Micromachines
Assuntos:	MEMS accelerometer temperature dependence microstructure thermal analysis TDE precise test based on heat conduction analysis PSO-GA-BPNN
Acesso em linha:	https://www.mdpi.com/2072-666X/13/6/835
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