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Synthesis of epitaxial TaO2 thin films on Al2O3 by suboxide molecular-beam epitaxy and thermal laser epitaxy

Tantalum dioxide (TaO2) is a metastable tantalum compound. Here, we report the epitaxial stabilization of TaO2 on Al2O3 (11̄02) (r-plane sapphire) substrates using suboxide molecular-beam epitaxy and thermal laser epitaxy, demonstrating single-oriented, monodomain growth of anisotropically strained...

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Main Authors: Yorick A. Birkhölzer, Anna S. Park, Noah Schnitzer, Jeffrey Z. Kaaret, Benjamin Z. Gregory, Tomas A. Kraay, Tobias Schwaigert, Matthew R. Barone, Brendan D. Faeth, Felix V. E. Hensling, Iris C. G. van den Bosch, Ellen M. Kiens, Christoph Baeumer, Enrico Bergamasco, Markus Grüninger, Alexander V. Bordovalos, Suresh Chaulagain, Nikolas J. Podraza, Waldemar Tokarz, Wojciech Tabis, Matthew J. Wahila, Suchismita Sarker, Christopher J. Pollock, Shun-Li Shang, Zi-Kui Liu, Nongnuch Artrith, Frank M. F. de Groot, Nicole A. Benedek, Andrej Singer, David A. Muller, Darrell G. Schlom
Format: Artigo
Language:Inglês
Published: AIP Publishing LLC 2026-07-01
Series:APL Materials
Online Access:https://pubs.aip.org/aip/apm/article-pdf/doi/10.1063/5.0322051/21066008/071106_1_5.0322051.pdf
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