Mechanism of Material Removal in Nanomachining of Fused Quartz using AFM Diamond Tip

Nanometer-scale machining experiments on fused quartz surfaces have been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force fnP required to reproducibly form a groove was about 4.7 µN. The minimum critical norm...

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Bibliografiske detaljer

Principais autores:	Yoshio ICHIDA, Takashi YAMAGUCHI, Makoto SASANUMA
Format:	Artigo
Sprog:	Inglês
Udgivet:	The Japan Society of Mechanical Engineers 2010-08-01
Serier:	Journal of Advanced Mechanical Design, Systems, and Manufacturing
Fag:	nanomachining atomic force microscope nanometer-scale groove fused quartz
Online adgang:	https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_1015/_pdf/-char/en
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