Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity
Currently, the most advanced micromachined microphones on the market are based on a capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) microphones resemble their millimetric counterparts, both in function and in performance. The most advanced MEMS microphones reach...
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| Autors principals: | , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2024-07-01
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| Col·lecció: | Micromachines |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2072-666X/15/7/879 |
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