Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors
In this paper, the reliability of a micro-electro-mechanical system (MEMS)-based gas sensor has been investigated using Three Dimensional (3D) coupled multiphysics Finite Element (FE) analysis. The coupled field analysis involved a two-way sequential electro- thermal fields coupling and a one-way se...
Furkejuvvon:
| Váldodahkkit: | , |
|---|---|
| Materiálatiipa: | Artigo |
| Giella: | Inglês |
| Almmustuhtton: |
MDPI AG
2007-03-01
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| Ráidu: | Sensors |
| Fáttát: | |
| Liŋkkat: | http://www.mdpi.com/1424-8220/7/3/319/ |
| Fáddágilkorat: |
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