Gas Permeation Property of Silicon Carbide Membranes Synthesized by Counter-Diffusion Chemical Vapor Deposition
An amorphous silicon carbide (SiC) membrane was synthesized by counter-diffusion chemical vapor deposition (CDCVD) using silacyclobutane (SCB) at 788 K. The SiC membrane on a Ni-γ-alumina (Al<sub>2</sub>O<sub>3</sub>) α-coated Al<sub>2</sub>O<sub>3</sub> porous support possessed a H<sub>2<...
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| Autori principali: | , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2020-01-01
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| Serie: | Membranes |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2077-0375/10/1/11 |
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