Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance

This paper presents a control algorithm for a micro-electro-mechanical system (MEMS) fast steering mirror (FSM), whose performance is poor in open loop control mode. Based on the characterization and parameter identification of MEMS FSM, an improved double step algorithm is proposed to shorten the s...

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Detalhes bibliográficos

Principais autores:	Yu Zihao, Wang Lihao, Wang Yang, Zhang Yonggui, Liu Yichen, Wu Zhenyu
Formato:	Artigo
Idioma:	Inglês
Publicado em:	IEEE 2023-01-01
coleção:	IEEE Access
Assuntos:	MEMS micromirror tracking control improved double step algorithm
Acesso em linha:	https://ieeexplore.ieee.org/document/10237181/
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