Preparation and characterization of DC sputtered molybdenum thin films

Molybdenum (Mo) thin films have been deposited on soda-lime glass substrates using a DC magnetron sputtering system. Their electrical resistivity, and their morphological, structural and adhesive properties have been examined with respect to the deposition power, deposition time and substrate temper...

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Autores principales:	Abd El-Hady B. Kashyout, Hesham M.A. Soliman, Hanaa Abou Gabal, Poussy Aly Ibrahim, Marwa Fathy
Formato:	Artigo
Lenguaje:	Inglês
Publicado:	Elsevier 2011-03-01
Colección:	Alexandria Engineering Journal
Materias:	Mo thin films Mono-crystalline DC sputtering Nanomaterials
Acceso en línea:	http://www.sciencedirect.com/science/article/pii/S1110016811000172
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