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Advanced Machining Technologies for CVD-SiC: Hybrid Approaches and AI-Enhanced Control for Ultra-Precision

Chemically vapor-deposited silicon carbide (CVD-SiC) is a high-performance material that possesses excellent mechanical, chemical, and electrical properties, making it highly promising for components in the semiconductor, aerospace, and automotive industries. However, its inherent hardness and britt...

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Principais autores: Su-Yeon Han, Seung-Min Lee, Min-Su Jang, Ho-Soon Yang, Tae-Soo Kwak
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2025-12-01
coleção:Applied Sciences
Assuntos:
chemically vapor-deposited silicon carbide (CVD-SiC)
machining
AI-based process
removal process
surface roughness
Acesso em linha:https://www.mdpi.com/2076-3417/15/24/12892
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