Study of the process-structure-property correlation in CVD-SiC coatings on graphite substrates
Abstract This study investigates the chemical vapor deposition (CVD) of SiC coatings on high-purity graphite susceptors, which serve as critical components in the epitaxial growth systems of III-V semiconductor materials (specifically GaN/SiC heterostructures). Using CH₃SiCl₃-H₂ as precursor with Ar...
I tiakina i:
| Ngā kaituhi matua: | , , , , , , , , , |
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| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
Nature Portfolio
2025-12-01
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| Rangatū: | Scientific Reports |
| Ngā marau: | |
| Urunga tuihono: | https://doi.org/10.1038/s41598-025-34258-y |
| Ngā Tūtohu: |
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