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Design and Research of 2-DOF Piezoelectric Nanopositioning Stage with Multiple Displacement Amplifiers and Decoupling Beams

A piezoelectric (PZT) nanopositioning stage with large stroke and low crosstalk is relatively appealing for microdisplacement operation. Rhombus and lever amplifiers are used to increase the overall displacement amplification ratio (DAR), and the symmetry of the amplification structure reduces the c...

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Bibliografiska uppgifter
Huvudupphov: Jing Yin, Chen Zhou, Xiaoting Chen, Dongcai Liu
Materialtyp: Artigo
Språk:Inglês
Utgiven: MDPI AG 2026-04-01
Serie:Micromachines
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Länkar:https://www.mdpi.com/2072-666X/17/4/484
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