Design and Research of 2-DOF Piezoelectric Nanopositioning Stage with Multiple Displacement Amplifiers and Decoupling Beams

A piezoelectric (PZT) nanopositioning stage with large stroke and low crosstalk is relatively appealing for microdisplacement operation. Rhombus and lever amplifiers are used to increase the overall displacement amplification ratio (DAR), and the symmetry of the amplification structure reduces the c...

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Bibliografische Detailangaben

Hauptverfasser:	Jing Yin, Chen Zhou, Xiaoting Chen, Dongcai Liu
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2026-04-01
Schriftenreihe:	Micromachines
Schlagworte:	piezoelectric nanopositioning stage compliant mechanism displacement amplifier decoupling mechanism lever amplifier
Online-Zugang:	https://www.mdpi.com/2072-666X/17/4/484
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