Ultra-high-aspect-ratio structures through silicon using infrared laser pulses focused with axicon-lens doublets
We describe how a direct combination of an axicon and a lens can represent a simple and efficient beam-shaping solution for laser material processing applications. We produce high-angle pseudo-Bessel micro-beams at 1550 nm, which would be difficult to produce by other methods. Combined with appropri...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Light Publishing Group
2024-04-01
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| coleção: | Light: Advanced Manufacturing |
| Assuntos: | |
| Acesso em linha: | https://www.light-am.com/article/doi/10.37188/lam.2024.022 |
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