Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process
Micro magnetic field (MMF) sensors developed employing complementary metal oxide semiconductor (CMOS) technology are investigated. The MMF sensors, which are a three-axis sensing type, include a magnetotransistor and four Hall elements. The magnetotransistor is utilized to detect the magnetic field...
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2018-08-01
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| coleção: | Micromachines |
| Assuntos: | |
| Acesso em linha: | http://www.mdpi.com/2072-666X/9/8/393 |
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