Design of a trajectory contour controller for a dual‐axis precision motion stage based on improved iterative learning
Abstract To solve the problem of contour error (CE) arising from the dual‐axis coupling of the X–Y coordinate planar motor stage under reciprocating motion conditions in integrated circuit (IC) manufacturing, the following two perspectives are considered: indirect intervention from a single‐axis ser...
שמור ב:
| Principais autores: | , , , , |
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| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
Wiley
2023-11-01
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| סדרה: | IET Control Theory & Applications |
| נושאים: | |
| גישה מקוונת: | https://doi.org/10.1049/cth2.12472 |
| תגים: |
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